 Nanoimprint lithography - NX-B200 (Nanonex) Location - Nanofabrication center |
 Custom made Physical Vapor Deposition system (VST Ltd) * E-gun evaporation * Chamber height - 1.1 meter * Vacuum load-lock * Computer controlled rotation and tilt of the upper sample holder Location - Nanofabrication center |
 Custom made Chemical Vapor Deposition for Nanowires * Fuly automatic control of the CVD process * Precursors for Silicon, Germanium, Nitrides and II-VI semiconductors are available Location - room 20 , building 63 |
 Inverted Motorized Microscope Nikon Eclipse Ti2-E2 * Fully motorized * Programmable stage * Multiple LED source * Red, blue, and green fluorescence * Scientific CMOS camera Andor Zyla 4.2 Plus Location - room 20 , building 63 |
 Upright microscope Zeiss Axio Scope A1 * Bright field, dark field, polarized light, DIC Location - room 20 , building 63 |
 Nikon Diaphot 300 inverted fluorescent microscope Location - room 20 building 63 |  Carl Suss scriber with microscope alignment Location - room 20 building 63 |
 Probe Station | |